Invention Application
- Patent Title: ACTIVE SPECTRAL CONTROL OF DUV LIGHT SOURCE
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Application No.: PCT/US2007/001667Application Date: 2007-01-22
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Publication No.: WO2007097855A3Publication Date: 2007-08-30
- Inventor: DUNSTAN, Wayne, J. , JACQUES, Robert, N. , RAO, Rajasekhar, M. , TRINTCHOUK, Fedor, B.
- Applicant: CYMER, INC. , DUNSTAN, Wayne, J. , JACQUES, Robert, N. , RAO, Rajasekhar, M. , TRINTCHOUK, Fedor, B.
- Applicant Address: (A NEVADA CORPORATION) 17075 Thommint Court San Diego, CA 92127-2413 US
- Assignee: CYMER, INC.,DUNSTAN, Wayne, J.,JACQUES, Robert, N.,RAO, Rajasekhar, M.,TRINTCHOUK, Fedor, B.
- Current Assignee: CYMER, INC.,DUNSTAN, Wayne, J.,JACQUES, Robert, N.,RAO, Rajasekhar, M.,TRINTCHOUK, Fedor, B.
- Current Assignee Address: (A NEVADA CORPORATION) 17075 Thommint Court San Diego, CA 92127-2413 US
- Agency: CRAY, William, C.
- Priority: US60/774,770 20060217; US11/510,037 20060825
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output light pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.
Information query
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