Invention Application
- Patent Title: レーザ照射装置及びレーザ照射方法及び改質された被対象物の製造方法
- Patent Title (English): Laser irradiation device, laser irradiation method, and method for manufacturing modified object
- Patent Title (中): 激光辐射装置,激光辐射方法和制造修改对象的方法
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Application No.: PCT/JP2007/055430Application Date: 2007-03-16
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Publication No.: WO2007114031A1Publication Date: 2007-10-11
- Inventor: 荻野 義明 , 木村 克巳 , 飯田 康弘
- Applicant: 日立コンピュータ機器株式会社 , 荻野 義明 , 木村 克巳 , 飯田 康弘
- Applicant Address: 〒2590180 神奈川県足柄上郡中井町境781番地 Kanagawa JP
- Assignee: 日立コンピュータ機器株式会社,荻野 義明,木村 克巳,飯田 康弘
- Current Assignee: 日立コンピュータ機器株式会社,荻野 義明,木村 克巳,飯田 康弘
- Current Assignee Address: 〒2590180 神奈川県足柄上郡中井町境781番地 Kanagawa JP
- Agency: 特許業務法人 プロテック
- Priority: JP2006-095754 20060330; JP2006-250408 20060915
- Main IPC: H01L21/268
- IPC: H01L21/268 ; H01L21/20
Abstract:
Provided are a laser irradiation device and a laser irradiation method, which are suitable for a liquid crystal display device. The laser irradiation device comprises a semiconductor laser element group (1A) having a plurality of semiconductor laser elements (1) arranged therein for emitting laser beams of a wavelength of 370 nm to 480 nm, optical fibers (2) for transmitting the laser beams emitted from the semiconductor laser elements (1), a straight bundle (3) for holding the optical fibers (2) straight, an optical adjustor (4) for shaping the laser beams outputted from the optical fibers held by the straight bundle (3), into a linear shape and for smoothing the top of the laser intensity distribution thereby to output the smoothed laser beams, and an objective lens (5) for condensing the laser beams outputted from the optical adjustor (4), as a linear laser spot on an object. The semiconductor laser element group (1A) has a total irradiation output value of 6 W to 100 W.
Information query
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