Invention Application
- Patent Title: MEMS DEVICE HAVING A RECESSED CAVITY AND METHODS THEREFOR
- Patent Title (中): 具有凹陷孔的MEMS器件及其方法
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Application No.: PCT/US2007/014359Application Date: 2007-06-19
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Publication No.: WO2007149475A2Publication Date: 2007-12-27
- Inventor: KHONSARI, Nassim , CHUI, Clarence
- Applicant: QUALCOMM INCORPORATED , KHONSARI, Nassim , CHUI, Clarence
- Applicant Address: 5775 Morehouse Drive San Diego, California 92121 US
- Assignee: QUALCOMM INCORPORATED,KHONSARI, Nassim,CHUI, Clarence
- Current Assignee: QUALCOMM INCORPORATED,KHONSARI, Nassim,CHUI, Clarence
- Current Assignee Address: 5775 Morehouse Drive San Diego, California 92121 US
- Agency: ABUMERI, Mark M.
- Priority: US60/815,905 20060621
- Main IPC: B81B7/00
- IPC: B81B7/00
Abstract:
A microelectromechanical systems device (730) having a transparent substrate (710) joined to a planar backplate (720) with a raised perimeter structure (740a) forming a recessed cavity or cell (780). The raised perimeter structure (740a) is formed by applying a first layer (740a) around the peripheral area of the backplate (720) to form a recessed cell (780). A second layer (740b) is applied over the first layer. The first layer (740a) is thicker than the second layer (740b). The thicker layer (740a) comprises a viscous material. A second layer (740b) is a thinner adhesive layer, and is applied over the thicker layer (740a) to join the backplate (720) to the transparent substrate (710) to encapsulate the microelectromechanical systems device (730) formed on the transparent substrate (710).
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