Invention Application
WO2008008162A3 SUPPORT STRUCTURE FOR FREE-STANDING MEMS DEVICE AND METHODS FOR FORMING THE SAME
审中-公开
用于自由站立MEMS器件的支持结构及其形成方法
- Patent Title: SUPPORT STRUCTURE FOR FREE-STANDING MEMS DEVICE AND METHODS FOR FORMING THE SAME
- Patent Title (中): 用于自由站立MEMS器件的支持结构及其形成方法
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Application No.: PCT/US2007014511Application Date: 2007-06-21
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Publication No.: WO2008008162A3Publication Date: 2008-04-03
- Inventor: KOGUT LIOR , TUNG MING-HAU , ARBUCKLE BRIAN
- Applicant: QUALCOMM MEMS TECHNOLOGIES INC , KOGUT LIOR , TUNG MING-HAU , ARBUCKLE BRIAN
- Assignee: QUALCOMM MEMS TECHNOLOGIES INC,KOGUT LIOR,TUNG MING-HAU,ARBUCKLE BRIAN
- Current Assignee: QUALCOMM MEMS TECHNOLOGIES INC,KOGUT LIOR,TUNG MING-HAU,ARBUCKLE BRIAN
- Priority: US47631706 2006-06-28
- Main IPC: B81B3/00
- IPC: B81B3/00
Abstract:
A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
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