Invention Application
- Patent Title: SOFT MEMS
- Patent Title (中): 软MEMS
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Application No.: PCT/US2007/012987Application Date: 2007-06-01
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Publication No.: WO2008030284A2Publication Date: 2008-03-13
- Inventor: LIU, Chang , ENGEL, Jonathan , CHEN, Nannan , RYU, Kee , LIU, Chang , TUCKER, Craig , YANG, Yingchen
- Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS , LIU, Chang , ENGEL, Jonathan , CHEN, Nannan , RYU, Kee , LIU, Chang , TUCKER, Craig , YANG, Yingchen
- Applicant Address: 506 South Wright Street 352 Henry Administration Building Urbana, IL 61801 US
- Assignee: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS,LIU, Chang,ENGEL, Jonathan,CHEN, Nannan,RYU, Kee,LIU, Chang,TUCKER, Craig,YANG, Yingchen
- Current Assignee: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS,LIU, Chang,ENGEL, Jonathan,CHEN, Nannan,RYU, Kee,LIU, Chang,TUCKER, Craig,YANG, Yingchen
- Current Assignee Address: 506 South Wright Street 352 Henry Administration Building Urbana, IL 61801 US
- Agency: FALLON, Steven, P. et al.
- Priority: US60/810,799 20060602
- Main IPC: G11C17/00
- IPC: G11C17/00
Abstract:
A microscale polymer-based apparatus comprises a substrate formed from a first polymer material and at least one active region integrated with the substrate. The at least one active region is patterned from a second polymer material that is modified to perform at least one function within the at least one active region.
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