Invention Application
- Patent Title: ATOMIC FORCE MICROSCOPE
- Patent Title (中): 原子力显微镜
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Application No.: PCT/US2007/077943Application Date: 2007-09-07
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Publication No.: WO2008031076A2Publication Date: 2008-03-13
- Inventor: TORTONESE, Marco , BEVIS, Christoper, F.
- Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION , TORTONESE, Marco , BEVIS, Christoper, F.
- Applicant Address: One Technology Drive Milpitas, CA 95035 US
- Assignee: KLA-TENCOR TECHNOLOGIES CORPORATION,TORTONESE, Marco,BEVIS, Christoper, F.
- Current Assignee: KLA-TENCOR TECHNOLOGIES CORPORATION,TORTONESE, Marco,BEVIS, Christoper, F.
- Current Assignee Address: One Technology Drive Milpitas, CA 95035 US
- Agency: AGHEVLI, Ramin et al.
- Priority: US11/518,320 20060908
- Main IPC: G01N13/16
- IPC: G01N13/16
Abstract:
In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a characteristic of the beam.
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