A process for preparing a cyclic organosilane using a solvent that promotes ring-closure reactions between an organosilane compound and a dihalo organic compound is disclosed. The ring-closure reactions may form a 4-, 5- or 6-member cyclic organosilane. The process involves a mixture including a dihalo organic compound, an organosilane having at least two functional groups, a solvent and magnesium (Mg). The two functional groups in the organosilane may include halogen, alkoxy or a combination thereof. In the presence of Mg, a Grignard intermediate is formed from the dihalo organic compound in the mixture. The solvent favors intra-molecular or self-coupling reactions of the Grignard intermediate. The intra-molecular or self-coupling reaction promotes ring-closure reaction of the Grignard intermediate to form the cyclic organosilane.