Invention Application
WO2008045375A3 METHODS AND APPARATUS FOR LOADING AND UNLOADING SUBSTRATE CARRIERS ON MOVING CONVEYORS USING FEEDBACK
审中-公开
使用反馈装载和卸载移动式输送机的基板载体的方法和装置
- Patent Title: METHODS AND APPARATUS FOR LOADING AND UNLOADING SUBSTRATE CARRIERS ON MOVING CONVEYORS USING FEEDBACK
- Patent Title (中): 使用反馈装载和卸载移动式输送机的基板载体的方法和装置
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Application No.: PCT/US2007021481Application Date: 2007-10-04
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Publication No.: WO2008045375A3Publication Date: 2008-07-10
- Inventor: RICE MICHAEL R , ENGLHARDT ERIC A , HUDGENS JEFFREY C , VAN KATWYK KIRK
- Applicant: APPLIED MATERIALS INC , RICE MICHAEL R , ENGLHARDT ERIC A , HUDGENS JEFFREY C , VAN KATWYK KIRK
- Assignee: APPLIED MATERIALS INC,RICE MICHAEL R,ENGLHARDT ERIC A,HUDGENS JEFFREY C,VAN KATWYK KIRK
- Current Assignee: APPLIED MATERIALS INC,RICE MICHAEL R,ENGLHARDT ERIC A,HUDGENS JEFFREY C,VAN KATWYK KIRK
- Priority: US82807006 2006-10-04
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to transfer a substrate earner between a docking station and a transport system/ the substrate carrier handler including an end effector adapted to support the substrate carrier; a controller coupled to the substrate carrier handler and operative to control the substrate carrier handler such that the end effector of the substrate carrier handler is operative to selectively engage and disengage the substrate carrier to and from the transport system while the substrate carrier is in motion; and a sensor coupled to the controller and operative to provide a signal to the controller indicative of information about the substrate carrier.
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