Invention Application
- Patent Title: UNDERCUT-FREE BLM PROCESS FOR PB-FREE AND PB-REDUCED C4
- Patent Title (中): 无PB和PB减少C4的无过程BLM过程
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Application No.: PCT/US2008/053703Application Date: 2008-02-12
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Publication No.: WO2008100923A2Publication Date: 2008-08-21
- Inventor: DAUBENSPECK, Timothy, H. , GAMBINO, Jeffrey, P. , MUZZY, Christopher, D. , SAUTER, Wolfgang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , DAUBENSPECK, Timothy, H. , GAMBINO, Jeffrey, P. , MUZZY, Christopher, D. , SAUTER, Wolfgang
- Applicant Address: New Orchard Road Armonk, NY 10504 US
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,DAUBENSPECK, Timothy, H.,GAMBINO, Jeffrey, P.,MUZZY, Christopher, D.,SAUTER, Wolfgang
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,DAUBENSPECK, Timothy, H.,GAMBINO, Jeffrey, P.,MUZZY, Christopher, D.,SAUTER, Wolfgang
- Current Assignee Address: New Orchard Road Armonk, NY 10504 US
- Agency: SABO, William, D.
- Priority: US11/673,618 20070212
- Main IPC: H01L21/44
- IPC: H01L21/44
Abstract:
A system and method for eliminating undercut when forming a C4 solder bump for BLM (Ball Limiting Metallurgy) and improving the C4 pitch. In the process, a barrier layer metal stack (20') is deposited above a metal pad layer (19'). A top layer (22') of the barrier layer metals (e.g., Cu) is patterned by CMP with a bottom conductive layer (21 ') of the barrier metal stack (20') removed by etching. The diffusion barrier (40) and C4 solder bump (50) may be formed by electroless plating, in one embodiment, using a maskless technique, or by an electroplating techniques using a patterned mask. This allows the pitch of the C4 solder bumps to be reduced.
Information query
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