Invention Application
WO2008100923A2 UNDERCUT-FREE BLM PROCESS FOR PB-FREE AND PB-REDUCED C4 审中-公开
无PB和PB减少C4的无过程BLM过程

UNDERCUT-FREE BLM PROCESS FOR PB-FREE AND PB-REDUCED C4
Abstract:
A system and method for eliminating undercut when forming a C4 solder bump for BLM (Ball Limiting Metallurgy) and improving the C4 pitch. In the process, a barrier layer metal stack (20') is deposited above a metal pad layer (19'). A top layer (22') of the barrier layer metals (e.g., Cu) is patterned by CMP with a bottom conductive layer (21 ') of the barrier metal stack (20') removed by etching. The diffusion barrier (40) and C4 solder bump (50) may be formed by electroless plating, in one embodiment, using a maskless technique, or by an electroplating techniques using a patterned mask. This allows the pitch of the C4 solder bumps to be reduced.
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