Invention Application
- Patent Title: OBJECTIVE LENS
- Patent Title (中): 物镜
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Application No.: PCT/EP2008001797Application Date: 2008-03-06
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Publication No.: WO2008107189A3Publication Date: 2009-03-05
- Inventor: DREXEL VOLKER
- Applicant: ZEISS CARL NTS GMBH , DREXEL VOLKER
- Assignee: ZEISS CARL NTS GMBH,DREXEL VOLKER
- Current Assignee: ZEISS CARL NTS GMBH,DREXEL VOLKER
- Priority: DE102007010873 2007-03-06
- Main IPC: H01J37/145
- IPC: H01J37/145 ; H01J37/141 ; H01J37/147
Abstract:
An objective lens (100) for focussing charged particles comprises a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece (2) of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece (1) of the magnetic lens, wherein the following relationship is satisfied: 1.5-Di = Da = 3-Di, and wherein the lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis OA.
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