Invention Application
WO2008125243A3 INTEGRATED COMPONENT HAVING ZONE PLATE DIFFRACTION OPTICS 审中-公开
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INTEGRATED COMPONENT HAVING ZONE PLATE DIFFRACTION OPTICS
Abstract:
The invention relates to an integrated component (10) comprising a filter structure having at least two structured metal layers (32; 82), each of the at least two structured metal layers having a zone plate structure (14) to achieve a spectral filtering effect, and an optoelectronic component (16). The filter structure (12) and the optoelectronic component (16) are integrated into a semiconductor substrate (16) in such a manner that the optoelectronic component (16) is arranged in a field concentration area of the filter structure (12).
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