Invention Application
WO2008140305A1 RADIATION GENERATING DEVICE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY
审中-公开
辐射发生器件,光刻设备,器件制造方法及其制造的器件
- Patent Title: RADIATION GENERATING DEVICE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY
- Patent Title (中): 辐射发生器件,光刻设备,器件制造方法及其制造的器件
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Application No.: PCT/NL2008/050260Application Date: 2008-04-28
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Publication No.: WO2008140305A1Publication Date: 2008-11-20
- Inventor: SOER, Wouter Anthon , VAN HERPEN, Maarten Marinus Johannes Wilhelmus
- Applicant: ASML NETHERLANDS B.V. , SOER, Wouter Anthon , VAN HERPEN, Maarten Marinus Johannes Wilhelmus
- Applicant Address: De Run 6501 NL-5504 DR Veldhoven NL
- Assignee: ASML NETHERLANDS B.V.,SOER, Wouter Anthon,VAN HERPEN, Maarten Marinus Johannes Wilhelmus
- Current Assignee: ASML NETHERLANDS B.V.,SOER, Wouter Anthon,VAN HERPEN, Maarten Marinus Johannes Wilhelmus
- Current Assignee Address: De Run 6501 NL-5504 DR Veldhoven NL
- Agency: HATZMANN, M.J.
- Priority: US11/798,037 20070509
- Main IPC: H05G2/00
- IPC: H05G2/00
Abstract:
A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid bath. The device also includes an actuator arranged to move the cable part from a liquid-adhering position to an ignition position, and an ignition source configured to trigger a discharge produced radiating plasma from the liquid adherent to the cable part, when the cable part is in the ignition position, by a discharge between the electrodes. The liquid-adhering position is a position for adhering a liquid from the bath to the part of the electrode.
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