Invention Application
WO2009040120A3 OPTICAL UNIT HAVING ADJUSTABLE FORCE ACTION ON AN OPTICAL MODULE
审中-公开
具有可调节力作用的光学模块光器件
- Patent Title: OPTICAL UNIT HAVING ADJUSTABLE FORCE ACTION ON AN OPTICAL MODULE
- Patent Title (中): 具有可调节力作用的光学模块光器件
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Application No.: PCT/EP2008008176Application Date: 2008-09-25
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Publication No.: WO2009040120A3Publication Date: 2009-06-18
- Inventor: SCHUBERT ERICH , HEISLER ANDREAS , HARTJES JOACHIM
- Applicant: ZEISS CARL SMT AG , SCHUBERT ERICH , HEISLER ANDREAS , HARTJES JOACHIM
- Assignee: ZEISS CARL SMT AG,SCHUBERT ERICH,HEISLER ANDREAS,HARTJES JOACHIM
- Current Assignee: ZEISS CARL SMT AG,SCHUBERT ERICH,HEISLER ANDREAS,HARTJES JOACHIM
- Priority: DE102007045975 2007-09-25
- Main IPC: G02B7/00
- IPC: G02B7/00 ; G03F7/20
Abstract:
The present invention relates to an optical unit, particularly for micro-lithography, comprising an optical module, a support structure und a force-generating device. The force-generating device is connected to the optical module and the support structure and is designed to exert a force on the optical module. The force-generating device comprises a fluid force-generating element having a working chamber that can be subjected to a working fluid having a working pressure. The force-generating element is designed as a muscle element, exerting a first tensile force at a first working pressure and exerting a second tensile force that is higher than the first tensile force at a second working pressure that is higher than the first working pressure.
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |