Invention Application
- Patent Title: PIEZOELECTRIC VIBRATION TYPE FORCE SENSOR
- Patent Title (中): 压电式振动式力传感器
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Application No.: PCT/JP2009/051147Application Date: 2009-01-20
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Publication No.: WO2009093727A1Publication Date: 2009-07-30
- Inventor: SATO, Shuuichi , SOMEYA, Yuichi , NISHIDA, Hideyuki , YOKOMATSU, Takao , NAKAMURA, Kentaro
- Applicant: CANON KABUSHIKI KAISHA , SATO, Shuuichi , SOMEYA, Yuichi , NISHIDA, Hideyuki , YOKOMATSU, Takao , NAKAMURA, Kentaro
- Applicant Address: 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501 JP
- Assignee: CANON KABUSHIKI KAISHA,SATO, Shuuichi,SOMEYA, Yuichi,NISHIDA, Hideyuki,YOKOMATSU, Takao,NAKAMURA, Kentaro
- Current Assignee: CANON KABUSHIKI KAISHA,SATO, Shuuichi,SOMEYA, Yuichi,NISHIDA, Hideyuki,YOKOMATSU, Takao,NAKAMURA, Kentaro
- Current Assignee Address: 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501 JP
- Agency: OKABE, Masao et al.
- Priority: JP2008-011626 20080122; JP2009-007768 20090116
- Main IPC: G01L1/10
- IPC: G01L1/10 ; H01L41/08
Abstract:
In a piezoelectric vibration type force sensor according to the present invention, vibration is restricted by a friction force between a piezoelectric body and a restricting member, and hence a range of sensing forces can be expanded compared with a case in which the vibration is restricted directly from a direction that is the same as an vibration direction. A conventional structure, in which a lead wire is soldered directly for electrically connecting the piezoelectric body to an external control circuit, causes a restriction of the vibration due to a solder attached to the piezoelectric body, resulting in narrowing the sensing range. Using the piezoelectric vibration type force sensor, the range of sensing forces can be expanded by making a state in which conducting portions of the piezoelectric body and the restricting member are not fixed but contact with each other for keeping electric conductivity.
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