Techniques for generating terahertz (THz) radiation are provided in which each nonlinear crystal in an array of such crystals is coupled to one or more corresponding waveguides such that any THz radiation generated in any single crystal is coupled into that crystal's THz waveguide structure. After the THz radiation is generated in the crystals and coupled into the waveguides, the individual THz signals may be coherently combined to form a single THz signal (non-coherent configurations are provided as well). Crystal-waveguide arrays embodying the techniques can be used to implement efficient, robust, and compact THz sources suitable for applications such as security screening, medical imaging, quality control and process monitoring in manufacturing operations, and package and container inspection.