Invention Application
WO2009131363A3 PRESSURE-SENSITIVE ADHESIVE FILM AND BACK-GRINDING METHOD USING THE SAME
审中-公开
压敏粘合膜和使用其的背面研磨方法
- Patent Title: PRESSURE-SENSITIVE ADHESIVE FILM AND BACK-GRINDING METHOD USING THE SAME
- Patent Title (中): 压敏粘合膜和使用其的背面研磨方法
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Application No.: PCT/KR2009002082Application Date: 2009-04-21
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Publication No.: WO2009131363A3Publication Date: 2010-03-11
- Inventor: KIM SE RA , BAEK YOON JEONG , KIM JANG SOON , SON HYUN HEE , HONG JONG WAN , PARK HYUN WOO
- Applicant: LG CHEMICAL LTD , KIM SE RA , BAEK YOON JEONG , KIM JANG SOON , SON HYUN HEE , HONG JONG WAN , PARK HYUN WOO
- Assignee: LG CHEMICAL LTD,KIM SE RA,BAEK YOON JEONG,KIM JANG SOON,SON HYUN HEE,HONG JONG WAN,PARK HYUN WOO
- Current Assignee: LG CHEMICAL LTD,KIM SE RA,BAEK YOON JEONG,KIM JANG SOON,SON HYUN HEE,HONG JONG WAN,PARK HYUN WOO
- Priority: KR20080036718 2008-04-21
- Main IPC: C09J5/00
- IPC: C09J5/00
Abstract:
The present invention concerns a pressure-sensitive adhesive film and a method for back-grinding semiconductor wafers using the same. The present invention provides, for example, a pressure-sensitive adhesive film having excellent brittleness and adhesion in the semiconductor production process, as well as a superior cushioning, and that is capable of markedly improving production efficiency in the wafer back-grinding process of semiconductor production. In addition, the present invention provides a pressure-sensitive adhesive film having superior releasability, re-releasable characteristics, and wafer wettability, and also exhibiting excellent water resistance; and a back-grinding method using the same.
Public/Granted literature
- WO2009131363A2 PRESSURE-SENSITIVE ADHESIVE FILM AND BACK-GRINDING METHOD USING THE SAME Public/Granted day:2009-10-29
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