Invention Application
WO2009131363A3 PRESSURE-SENSITIVE ADHESIVE FILM AND BACK-GRINDING METHOD USING THE SAME 审中-公开
压敏粘合膜和使用其的背面研磨方法

PRESSURE-SENSITIVE ADHESIVE FILM AND BACK-GRINDING METHOD USING THE SAME
Abstract:
The present invention concerns a pressure-sensitive adhesive film and a method for back-grinding semiconductor wafers using the same. The present invention provides, for example, a pressure-sensitive adhesive film having excellent brittleness and adhesion in the semiconductor production process, as well as a superior cushioning, and that is capable of markedly improving production efficiency in the wafer back-grinding process of semiconductor production. In addition, the present invention provides a pressure-sensitive adhesive film having superior releasability, re-releasable characteristics, and wafer wettability, and also exhibiting excellent water resistance; and a back-grinding method using the same.
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