Invention Application
WO2010005609A1 METHOD AND APPARATUS FOR CURING THIN FILMS ON LOW-TEMPERATURE SUBSTRATES AT HIGH SPEEDS
审中-公开
用于在高温下固化低温基材薄膜的方法和装置
- Patent Title: METHOD AND APPARATUS FOR CURING THIN FILMS ON LOW-TEMPERATURE SUBSTRATES AT HIGH SPEEDS
- Patent Title (中): 用于在高温下固化低温基材薄膜的方法和装置
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Application No.: PCT/US2009/039174Application Date: 2009-04-01
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Publication No.: WO2010005609A1Publication Date: 2010-01-14
- Inventor: SCHRODER, Kurt, A. , MARTIN, Karl, M. , JACKSON, Doug, K. , McCOOL, Steven, C.
- Applicant: NCC NANO, LLC , SCHRODER, Kurt, A. , MARTIN, Karl, M. , JACKSON, Doug, K. , McCOOL, Steven, C.
- Applicant Address: Three Forest Plaza, Suite 930 12221 Merit Drive Dallas, TX 75250 US
- Assignee: NCC NANO, LLC,SCHRODER, Kurt, A.,MARTIN, Karl, M.,JACKSON, Doug, K.,McCOOL, Steven, C.
- Current Assignee: NCC NANO, LLC,SCHRODER, Kurt, A.,MARTIN, Karl, M.,JACKSON, Doug, K.,McCOOL, Steven, C.
- Current Assignee Address: Three Forest Plaza, Suite 930 12221 Merit Drive Dallas, TX 75250 US
- Agency: NG, Antony, P.
- Priority: US61/079,339 20080709
- Main IPC: G03G19/00
- IPC: G03G19/00
Abstract:
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
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