Invention Application
WO2010047556A3 SEED CHUCK FOR A SINGLE CRYSTAL SILICON INGOT GROWING APPARATUS
审中-公开
一种单晶硅铸锭成长装置的种子夹头
- Patent Title: SEED CHUCK FOR A SINGLE CRYSTAL SILICON INGOT GROWING APPARATUS
- Patent Title (中): 一种单晶硅铸锭成长装置的种子夹头
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Application No.: PCT/KR2009006151Application Date: 2009-10-23
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Publication No.: WO2010047556A3Publication Date: 2010-07-22
- Inventor: MOON JI-HUN , KIM BONG-WOO , CHOI LL-SOO , LEE GUN-HO , JEONG SEUNG , KIM DO-YEON
- Applicant: SILTRON INC , MOON JI-HUN , KIM BONG-WOO , CHOI LL-SOO , LEE GUN-HO , JEONG SEUNG , KIM DO-YEON
- Assignee: SILTRON INC,MOON JI-HUN,KIM BONG-WOO,CHOI LL-SOO,LEE GUN-HO,JEONG SEUNG,KIM DO-YEON
- Current Assignee: SILTRON INC,MOON JI-HUN,KIM BONG-WOO,CHOI LL-SOO,LEE GUN-HO,JEONG SEUNG,KIM DO-YEON
- Priority: KR20080104931 2008-10-24
- Main IPC: C30B15/32
- IPC: C30B15/32
Abstract:
The present invention relates to a seed chuck for a single crystal silicon ingot growing apparatus. The seed chuck of the present invention is arranged in the single crystal silicon ingot growing apparatus based on the Czochralski process to hold a seed for growing single crystal silicon ingots. Said seed chuck comprises a seed chuck body having an upper portion with a rope joint part coupled with an ascending or descending rope, and a lower portion with a seed holding portion for accommodating and holding the seed. The seed chuck body has a hole for inserting a cooling pipe which has a vacuumed interior filled with a predetermined amount of refrigerant, and both ends of which are sealed. The cooling pipe is fitted into the insertion hole. The present invention employs a seed chuck with a cooling means to lower the temperature in a seed neck area during a body growing process and increase tensile strength. Whereby, large diameter single crystal silicon ingots can be safely grown.
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