Invention Application
WO2010064776A1 TRANSMISSION DIFFRACTION DEVICE FOR HIGH DIFFRACTION ORDER AND METHOD OF FABRICATING THE SAME 审中-公开
用于高折射率的传输差分装置及其制造方法

TRANSMISSION DIFFRACTION DEVICE FOR HIGH DIFFRACTION ORDER AND METHOD OF FABRICATING THE SAME
Abstract:
A transmission diffraction device having a high diffraction order and a method of fabricating the same are provided. The diffraction device includes a light transmissible body, and at least one V-shaped groove formed in the light transmissible body. The V-shaped groove includes reflection and refraction planes. This diffraction device produces high-order diffracted light. As the diffraction order of the diffracted light becomes higher, the resolving power of the diffraction device can be improved.
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