发明申请
- 专利标题: FLEXURE GUIDE BEARING FOR SHORT STROKE STAGE
- 专利标题(中): 柔性指南用于短程舞台
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申请号: PCT/US2010/025551申请日: 2010-02-26
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公开(公告)号: WO2010099420A2公开(公告)日: 2010-09-02
- 发明人: KOSMOWSKI, Mark T.
- 申请人: ELECTRO SCIENTIFIC INDUSTRIES, INC. , KOSMOWSKI, Mark T.
- 申请人地址: 13900 NW Science Park Dr. Portland, OR 97229 US
- 专利权人: ELECTRO SCIENTIFIC INDUSTRIES, INC.,KOSMOWSKI, Mark T.
- 当前专利权人: ELECTRO SCIENTIFIC INDUSTRIES, INC.,KOSMOWSKI, Mark T.
- 当前专利权人地址: 13900 NW Science Park Dr. Portland, OR 97229 US
- 代理机构: KNIGHT, Michelle L. et al.
- 优先权: US12/394,966 20090227
- 主分类号: B23K26/08
- IPC分类号: B23K26/08 ; B23K26/04 ; B23K26/42
摘要:
A laser processing system in which a laser beam propagates along a beam axis and through a lens for incidence on a work surface of a target specimen mounted on a support. The lens forms a focal region of the laser beam. The support is operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface. An assembly includes at least one flexure that supports the lens and guides movement of the lens along the beam axis in response to a motive force to adjust the focal region of the laser beam relative to the work surface.