Invention Application
- Patent Title: METHOD FOR PRODUCING A METALLIZATION HAVING TWO MULTIPLE ALTERNATING METALLIZATION LAYERS FOR AT LEAST ONE CONTACT PAD AND SEMICONDUCTOR WAFER HAVING SAID METALLIZATION FOR AT LEAST ONE CONTACT PAD
- Patent Title (中): 一种用于生产金属化多发性两种交替金属化至少一个接触焊盘半导体晶片与本特金至少一个接触垫
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Application No.: PCT/EP2010053553Application Date: 2010-03-18
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Publication No.: WO2010106144A3Publication Date: 2010-11-18
- Inventor: SIDOROV VICTOR , ZHYTNYTSKA RIMMA , WUERFL JOACHIM
- Applicant: FORSCHUNGSVERBUND BERLIN EV , SIDOROV VICTOR , ZHYTNYTSKA RIMMA , WUERFL JOACHIM
- Assignee: FORSCHUNGSVERBUND BERLIN EV,SIDOROV VICTOR,ZHYTNYTSKA RIMMA,WUERFL JOACHIM
- Current Assignee: FORSCHUNGSVERBUND BERLIN EV,SIDOROV VICTOR,ZHYTNYTSKA RIMMA,WUERFL JOACHIM
- Priority: DE102009013921 2009-03-19
- Main IPC: H01L21/60
- IPC: H01L21/60
Abstract:
The invention relates to a metallization (40) (and a semiconductor wafer (10) having corresponding metallization) and to a method for the production thereof that first of all can be produced by means of physical gas phase separation (dry separation) and secondly ensures sufficient adhesion of a lot bump. The method for producing a metallization (40) for at least one contact pad (20) according to the invention comprises the following process steps: applying at least one contact pad (20) to a substrate (10), applying a barrier layer (30) to the top side of the at least one contact pad (20) and applying a metallization (40) to the top side of the barrier layer (30), the barrier layer (30) and the metallization (40) being applied by means of physical separation and the metallization (40) being designed as a layer structure having two multiple alternating metallization layers (41, 42), wherein the first metallization layer (41) is made of nickel or an Ni alloy having a layer thickness of less than 500 nm and the second metallization layer (42) is made of a material that is different than nickel and is electrically conductive.
Information query
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