Invention Application
WO2011026067A2 METHOD FOR MAKING A FILM CASSETTE FOR GASEOUS VAPOR DEPOSITION 审中-公开
用于制备用于气体蒸发沉积的膜的方法

METHOD FOR MAKING A FILM CASSETTE FOR GASEOUS VAPOR DEPOSITION
Abstract:
The present invention is a method for making a film cassette end plate and a film cassette comprises two end plates. The uncoated end plates are formed using one of several known plastic forming methods. The end plates are coated with an inorganic coating to impart smoothness and hardness to facilitate film handling and reduce wear. The end plates are mounted on a shaft to form a cassette.
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