Invention Application
WO2011069876A1 AN OPTICAL BEAM SCANNER 审中-公开
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AN OPTICAL BEAM SCANNER
Abstract:
A beam scanner comprising at least one array (20) of a plurality micromirrors (30) and a method of scanning beams. The array is installed on a substrate (21). At least some of the plurality of micromirrors in the array are configured to be moved away and rotated with respect to the substrate.
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