Various methods and apparatus for establishing thermal pathways for a semiconductor device using solder-type thermal material (90) are disclosed. In one aspect, a method of manufacturing is provided that includes providing a first semiconductor chip (20) that has a substrate and a first active circuitry portion (40) extending a first distance into the substrate. A barrier (135),which inhibits the diffusion of solder, is formed in the first semiconductor chip (20) that surrounds but is laterally separated from the first active circuitry portion (40) and extends into the substrate a second distance greater than the first distance.