Invention Application
- Patent Title: AIR FLOW ASSISTED CHIP SELF-ASSEMBLY
- Patent Title (中): 空气流辅助芯片自组装
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Application No.: PCT/NL2011050089Application Date: 2011-02-08
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Publication No.: WO2011099848A3Publication Date: 2012-10-26
- Inventor: DIETZEL ANDREAS HEINRICH , VAN DEN BRAND JEROEN
- Applicant: TNO , DIETZEL ANDREAS HEINRICH , VAN DEN BRAND JEROEN
- Assignee: TNO,DIETZEL ANDREAS HEINRICH,VAN DEN BRAND JEROEN
- Current Assignee: TNO,DIETZEL ANDREAS HEINRICH,VAN DEN BRAND JEROEN
- Priority: EP10153202 2010-02-10
- Main IPC: H01L21/98
- IPC: H01L21/98 ; G06K19/077 ; H01L21/60 ; H01L21/68
Abstract:
The invention relates to a placement method for placement of a chip component (10) on a flexible substrate (20), comprising: providing a support face (21 ) comprised of the flexible substrate (20) or of a support structure (70) to be aligned with the flexible substrate (20); administering a chip (10) to the support face (21 ); generating with a pressure chamber (60) an air flow in an out of plane orientation relative to the support face (21); and directing the chip (10) to a placement position (30) by means of a directional structure (40) provided on the support face (21 ). In particular the chip (10) is levitated from the support face (21 ) by said air flow or by vibrational contact between the support face (21 ) and the chip (10) induced by said air flow. When the support face (21 ) is comprised by a support structure (70) distinct from the flexible substrate (20), the support face (21 ) is aligned with the flexible substrate (20). Accordingly, air cushion or intermittent contact forces (modulated in time and space using modulated micro-features) can be used to provide local interactions with the micro-part (chip) (10) so as to position micro-parts (10) with reference to micro-features arranged on the flexible substrate (20). The placement method may be applied for self-assembly of chips (10) on the flexible substrate (20), using a reel-to-reel process.
Information query
IPC分类: