Invention Application
- Patent Title: BALL-SPACER METHOD FOR PLANAR OBJECT LEVELING
- Patent Title (中): 用于平面对象平衡的球间距方法
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Application No.: PCT/US2011000727Application Date: 2011-04-26
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Publication No.: WO2011139337A3Publication Date: 2012-03-08
- Inventor: BUSSAN JOHN EDWARD , HAAHEIM JASON R , MOSKAL JOHN , SOLHEIM EDWARD R , VAL-KHVALABOV VADIM , NELSON MICHAEL R , AMRO NABIL A , VAKIL JAVAD M
- Applicant: NANOINK INC , BUSSAN JOHN EDWARD , HAAHEIM JASON R , MOSKAL JOHN , SOLHEIM EDWARD R , VAL-KHVALABOV VADIM , NELSON MICHAEL R , AMRO NABIL A , VAKIL JAVAD M
- Assignee: NANOINK INC,BUSSAN JOHN EDWARD,HAAHEIM JASON R,MOSKAL JOHN,SOLHEIM EDWARD R,VAL-KHVALABOV VADIM,NELSON MICHAEL R,AMRO NABIL A,VAKIL JAVAD M
- Current Assignee: NANOINK INC,BUSSAN JOHN EDWARD,HAAHEIM JASON R,MOSKAL JOHN,SOLHEIM EDWARD R,VAL-KHVALABOV VADIM,NELSON MICHAEL R,AMRO NABIL A,VAKIL JAVAD M
- Priority: US32855710 2010-04-27
- Main IPC: G03F7/00
- IPC: G03F7/00
Abstract:
An apparatus for leveling an array of microscopic pens with respect to a substrate surface is provided. The apparatus includes an array of microscopic pens; a substrate having a substrate surface; a controllable arm comprising a spherical ball on an end thereof; a force sensor configured to measure a force exerted on the array or the substrate surface at each of the plurality of positions; one or more actuators configured to drive the array and/or the substrate to vary a relative distance and a relative tilting between the array and the substrate surface; and a controller configured to determine a planar offset of the array with respect to the substrate and initiate a leveling of the array with respect to the substrate based on the planar offset. Methods are also provided.
Public/Granted literature
- WO2011139337A9 BALL-SPACER METHOD FOR PLANAR OBJECT LEVELING Public/Granted day:2012-01-05
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