Invention Application
- Patent Title: PRESSURE SENSOR
- Patent Title (中): 压力传感器
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Application No.: PCT/IB2011/052090Application Date: 2011-05-12
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Publication No.: WO2011141886A2Publication Date: 2011-11-17
- Inventor: SALMASO, Luca , MONICHINO, Massimo , NEBBIA, Fabio
- Applicant: METALLUX SA , SALMASO, Luca , MONICHINO, Massimo , NEBBIA, Fabio
- Applicant Address: Via Moree, 12 CH-6850 Mendrisio CH
- Assignee: METALLUX SA,SALMASO, Luca,MONICHINO, Massimo,NEBBIA, Fabio
- Current Assignee: METALLUX SA,SALMASO, Luca,MONICHINO, Massimo,NEBBIA, Fabio
- Current Assignee Address: Via Moree, 12 CH-6850 Mendrisio CH
- Agency: GALLAROTTI, Franco
- Priority: ITTO2010A000396 20100512
- Main IPC: G01L9/00
- IPC: G01L9/00
Abstract:
A pressure sensor ( 1 ) comprises a pressure-sensitive element, formed by a die made of semiconductor material (6), particularly silicon, a substrate (2) and an electric circuit (7) to which the die (6) is electrically connected. A face of the die (6) is directly bonded to a flat face (5) of the substrate (2) through at least one layer of glassy material (10). Preferably the electric circuit comprises a plurality of electrically conductive tracks (7), at least part of which is formed on the flat surface (5) of the substrate (2).
Information query