Invention Application
WO2011162903A1 MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE
审中-公开
主振荡器功率放大器驱动激光器用于EUV光源的预脉冲
- Patent Title: MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE
- Patent Title (中): 主振荡器功率放大器驱动激光器用于EUV光源的预脉冲
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Application No.: PCT/US2011/037793Application Date: 2011-05-24
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Publication No.: WO2011162903A1Publication Date: 2011-12-29
- Inventor: HOU, Kai-chung , SANDSTROM, Richard, L , PARTLO, William, N. , BROWN, Daniel, J.W. , FOMENKOV, Igor, V.
- Applicant: CYMER, INC. , HOU, Kai-chung , SANDSTROM, Richard, L , PARTLO, William, N. , BROWN, Daniel, J.W. , FOMENKOV, Igor, V.
- Applicant Address: (a Nevada Corporation) 17075 Thornmint Court San Diego, CA 92127-2413 US
- Assignee: CYMER, INC.,HOU, Kai-chung,SANDSTROM, Richard, L,PARTLO, William, N.,BROWN, Daniel, J.W.,FOMENKOV, Igor, V.
- Current Assignee: CYMER, INC.,HOU, Kai-chung,SANDSTROM, Richard, L,PARTLO, William, N.,BROWN, Daniel, J.W.,FOMENKOV, Igor, V.
- Current Assignee Address: (a Nevada Corporation) 17075 Thornmint Court San Diego, CA 92127-2413 US
- Agency: NGUYEN, Joseph, A.
- Priority: US61/398,452 20100624; US13/077,236 20110331
- Main IPC: H01S3/00
- IPC: H01S3/00
Abstract:
A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ 1 and λ 2 , with λ 1 ≠ λ 2 ; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ 1 ; a main pulse seed laser generating a laser output having wavelength, λ 2 ; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
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