Invention Application
- Patent Title: CLOSED-LOOP CONTROL OF CMP SLURRY FLOW
- Patent Title (中): CMP浆液流动的闭环控制
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Application No.: PCT/US2011/041255Application Date: 2011-06-21
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Publication No.: WO2012005939A2Publication Date: 2012-01-12
- Inventor: MENK, Gregory E. , TSAI, Stan D. , CHO, Sang J. , DHANDAPANI, Sivakumar
- Applicant: APPLIED MATERIALS, INC. , MENK, Gregory E. , TSAI, Stan D. , CHO, Sang J. , DHANDAPANI, Sivakumar
- Applicant Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Assignee: APPLIED MATERIALS, INC.,MENK, Gregory E.,TSAI, Stan D.,CHO, Sang J.,DHANDAPANI, Sivakumar
- Current Assignee: APPLIED MATERIALS, INC.,MENK, Gregory E.,TSAI, Stan D.,CHO, Sang J.,DHANDAPANI, Sivakumar
- Current Assignee Address: 3050 Bowers Avenue Santa Clara, California 95054 US
- Agency: PATTERSON, B. Todd et al.
- Priority: US12/831,153 20100706
- Main IPC: H01L21/304
- IPC: H01L21/304
Abstract:
Embodiments of the present invention generally relate to methods for chemical mechanical polishing a substrate. The methods generally include measuring the thickness of a polishing pad having grooves or other slurry transport features on a polishing surface. Once the depth of the grooves on the polishing surface is determined, a flow rate of a polishing slurry is adjusted in response to the determined groove depth. A predetermined number of substrates are polished on the polishing surface. The method can then optionally be repeated.
Information query
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