Invention Application
WO2012005939A2 CLOSED-LOOP CONTROL OF CMP SLURRY FLOW 审中-公开
CMP浆液流动的闭环控制

CLOSED-LOOP CONTROL OF CMP SLURRY FLOW
Abstract:
Embodiments of the present invention generally relate to methods for chemical mechanical polishing a substrate. The methods generally include measuring the thickness of a polishing pad having grooves or other slurry transport features on a polishing surface. Once the depth of the grooves on the polishing surface is determined, a flow rate of a polishing slurry is adjusted in response to the determined groove depth. A predetermined number of substrates are polished on the polishing surface. The method can then optionally be repeated.
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