Invention Application
WO2012009612A3 METHOD OF PLASMA PREPARATION OF METALLIC CONTACTS TO ENHANCE MECHANICAL AND ELECTRICAL INTEGRITY OF SUBSEQUENT INTERCONNECT BONDS 审中-公开
金属接触等离子体的制备方法,以提高后续互连点的机械和电气完整性

METHOD OF PLASMA PREPARATION OF METALLIC CONTACTS TO ENHANCE MECHANICAL AND ELECTRICAL INTEGRITY OF SUBSEQUENT INTERCONNECT BONDS
Abstract:
A method of removing oxidation from certain metallic contact surfaces utilizing a combination of relatively simple and inexpensive off-the-shelf equipment and specific chemistry. The method being a very rapid dry process which does not require a vacuum or containment chamber, or toxic gasses/chemicals, and does not damage sensitive electronic circuits or components. Additionally, the process creates a passivation layer on the surface of the metallic contact which inhibits further oxidation while allowing rapid and complete bonding, even many hours after surface treatment, without having to remove the passivation layer. The process utilizes a room-ambient plasma applicator with hydrogen, nitrogen, and inert gasses.
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