Invention Application
- Patent Title: REAL-TIME MONITORING OF RETAINING RING THICKNESS AND LIFETIME
- Patent Title (中): 保持环厚度和寿命的实时监测
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Application No.: PCT/US2011036731Application Date: 2011-05-17
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Publication No.: WO2012018425A3Publication Date: 2012-05-18
- Inventor: MCREYNOLDS PETER , RONDUM ERIC S , LEUNG GARLEN C , ZHONG ADAM H , MENK GREGORY E , PRABHU GOPALAKRISHNA B , OSTERHELD THOMAS H
- Applicant: APPLIED MATERIALS INC , MCREYNOLDS PETER , RONDUM ERIC S , LEUNG GARLEN C , ZHONG ADAM H , MENK GREGORY E , PRABHU GOPALAKRISHNA B , OSTERHELD THOMAS H
- Assignee: APPLIED MATERIALS INC,MCREYNOLDS PETER,RONDUM ERIC S,LEUNG GARLEN C,ZHONG ADAM H,MENK GREGORY E,PRABHU GOPALAKRISHNA B,OSTERHELD THOMAS H
- Current Assignee: APPLIED MATERIALS INC,MCREYNOLDS PETER,RONDUM ERIC S,LEUNG GARLEN C,ZHONG ADAM H,MENK GREGORY E,PRABHU GOPALAKRISHNA B,OSTERHELD THOMAS H
- Priority: US84379310 2010-07-26
- Main IPC: H01L21/304
- IPC: H01L21/304 ; H01L21/66
Abstract:
A method and apparatus for monitoring the condition of a surface of a retaining ring disposed on a carrier head in a polishing module is described. In one embodiment, an apparatus is provided. The apparatus includes a carrier head movable in a travel path between at least one polishing station for polishing a substrate as the substrate is retained in the carrier head, and a transfer station for transferring the substrate to and from the carrier head, the carrier head having a retaining ring, and a sensor disposed in the travel path of the carrier head, the sensor operable to provide a metric indicative of a condition of the retaining ring.
Information query
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