Invention Application
- Patent Title: METAL OXIDE METAL CAPACITOR STRUCTURES
- Patent Title (中): 金属氧化物金属电容器结构
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Application No.: PCT/US2012036897Application Date: 2012-05-08
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Publication No.: WO2012154720A3Publication Date: 2013-04-25
- Inventor: SUTARDJA SEHAT
- Applicant: MARVELL WORLD TRADE LTD , SUTARDJA SEHAT
- Assignee: MARVELL WORLD TRADE LTD,SUTARDJA SEHAT
- Current Assignee: MARVELL WORLD TRADE LTD,SUTARDJA SEHAT
- Priority: US201161484102 2011-05-09; US201213465621 2012-05-07
- Main IPC: H01L29/92
- IPC: H01L29/92 ; H01G4/005 ; H01G4/10 ; H01G4/228
Abstract:
A metal oxide metal (MOM) capacitor includes an outer conducting structure defined in a plurality of metal layers and a plurality of via layers of an integrated circuit including first opposing side walls, second opposing side walls, a cavity with first and second openings, and openings in the first opposing side walls. An inner conducting structure is defined in the plurality of metal layers and the plurality of via layers of the integrated circuit. The inner conducting structure is arranged in the cavity of the outer conducting structure and includes a body, and conducting extensions that extend from the body through the openings in the first opposing side walls. Oxide is arranged between the outer conducting structure and the inner conducting structure.
Information query
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