Invention Application
WO2012156071A8 LASER MATERIAL PROCESSING SYSTEM WITH AT LEAST ONE INERTIAL SENSOR; CORRESPONDING LASER PROCESSING METHOD 审中-公开
具有至少一个惯性传感器的激光材料加工系统; 相应的激光加工方法

LASER MATERIAL PROCESSING SYSTEM WITH AT LEAST ONE INERTIAL SENSOR; CORRESPONDING LASER PROCESSING METHOD
Abstract:
The present invention relates to a laser material processing system for processing a workpiece (10) by means of a laser beam (12), comprising: an optical system (16) having at least one optical component (22, 38, 40) for focusing the laser beam (12) to form a focal point (18) on the workpiece (10) or in a defined position relative to the workpiece (10); at least one inertial sensor (24) for detecting a transitional and/or rotational acceleration of the at least one optical component (22, 38, 40) of the optical system (16) and/or the workpiece (10); and a processing unit (32) connected to the at least one inertial sensor (24) for determining a relative transitional and/or rotational acceleration between the focal point (18) and the workpiece (10).
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