Invention Application
WO2013019082A3 CONTINUOUS PRODUCTION METHOD FOR SILICON TETRAFLUORIDE USING SILICA AND HYDROGEN FLUORIDE 审中-公开
使用二氧化硅和氢氟酸的硅四氯化物的连续生产方法

CONTINUOUS PRODUCTION METHOD FOR SILICON TETRAFLUORIDE USING SILICA AND HYDROGEN FLUORIDE
Abstract:
The present invention relates to a continuous production method for silicon tetrafluoride (SiF4) using silica (SiO2) and hydrogen fluoride (HF), and, more specifically, relates to a continuous production method for silicon tetrafluoride, wherein silica and hydrogen fluoride (HF) are reacted by filling a bed reactor with crystalline or amorphous silica in the solid state and blowing hydrogen fluoride gas directly therein, such that it is possible to continuously produce silicon tetrafluoride in a high yield, and it is possible to use diverse forms of silica as raw materials and hence it is possible to ensure relatively economic operation.
Patent Agency Ranking
0/0