Invention Application
- Patent Title: OPTICALLY TRANSPARENT AND ELECTRICALLY CONDUCTIVE COATINGS AND METHOD FOR THEIR DEPOSITION ON A SUBSTRATE
- Patent Title (中): 光透明导电涂料及其在基材上沉积的方法
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Application No.: PCT/EP2012/070260Application Date: 2012-10-12
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Publication No.: WO2013053889A1Publication Date: 2013-04-18
- Inventor: PRUNERI, Prof. Valerio , CARRILERO, Dr. Albert , PETERS, Dr. Jan-Hendrik
- Applicant: FUNDACIÓ INSTITUT DE CIÈNCIES FOTÒNIQUES , INSTITUCIO CATALANA DE RECERCA I ESTUDIS AVANCATS , CARL ZEISS SMS GMBH
- Applicant Address: Mediterranean Technology Park Av. Carl Friedrich Gauss, num. 3 E-08860 Castelldefels (Barcelona) ES
- Assignee: FUNDACIÓ INSTITUT DE CIÈNCIES FOTÒNIQUES,INSTITUCIO CATALANA DE RECERCA I ESTUDIS AVANCATS,CARL ZEISS SMS GMBH
- Current Assignee: FUNDACIÓ INSTITUT DE CIÈNCIES FOTÒNIQUES,INSTITUCIO CATALANA DE RECERCA I ESTUDIS AVANCATS,CARL ZEISS SMS GMBH
- Current Assignee Address: Mediterranean Technology Park Av. Carl Friedrich Gauss, num. 3 E-08860 Castelldefels (Barcelona) ES
- Agency: WEGNER, Hans et al.
- Priority: EP11185280.2 20111014
- Main IPC: G03F1/22
- IPC: G03F1/22 ; G03F1/38
Abstract:
The present inventions relates to a substrate for a photolithographic mask comprising a coating deposited on a rear surface of the substrate, wherein the coating comprises (a) at least one electrically conducting layer, and (b) wherein a thickness of the at least one layer is smaller than 30 nm, preferably smaller than 20 nm, and most preferably smaller than 10 nm.
Information query
