Invention Application
WO2013138461A1 TRICHLOROSILANE PRODUCTION 审中-公开
三氯硅烷生产

TRICHLOROSILANE PRODUCTION
Abstract:
A process that includes combining hydrogen chloride, metallurgical grade silicon and a third gas, e.g., tetrachlorosilane, in a reactor, under reaction conditions that include a temperature of 250-400C and a pressure of 2-33 barg, for a time sufficient to convert metallurgical grade silicon to an exit gas that includes trichlorosilane.
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