Invention Application
- Patent Title: MAPPING DENSITY AND TEMPERATURE OF A CHIP, IN SITU
- Patent Title (中): 在一个芯片的映射密度和温度
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Application No.: PCT/US2013/055045Application Date: 2013-08-15
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Publication No.: WO2014074193A1Publication Date: 2014-05-15
- Inventor: CAIN, Jerome, L. , VALLETT, David, P.
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: New Orchard Road Armonk, NY 10504 US
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: New Orchard Road Armonk, NY 10504 US
- Agency: CANALE, Anthony, J.
- Priority: US13/669,801 20121106
- Main IPC: G01N9/24
- IPC: G01N9/24 ; G01N29/07 ; H03H9/145
Abstract:
A method and system to map density and temperature of a chip, in situ, is disclosed. The method includes measuring a propagation time that a mechanical propagation wave (100) travels along at least one predefined path (12, 14) in a substrate (10). The method further includes calculating an average substrate density and temperature along the at least one predefined path as a function of the propagation time and distance. The method further includes determining a defect or unauthorized modification (18) in the substrate based on the average substrate density being different than a baseline substrate density.
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