A scanning device (64, 220, 230) includes a substrate (68), which is etched to define an array of two or more parallel rotating members (102) and a gimbal (72, 232) surrounding the rotating members. First hinges (106, 234) connect the gimbal to the substrate and defining a first axis of rotation, about which the gimbal rotates relative to the substrate. Second hinges (74) connect the rotating members to the support and defining respective second, mutually-parallel axes of rotation of the rotating members relative to the support, which are not parallel to the first axis.