Invention Application
WO2015114635A9 CHIP DEVICE FOR MONITORING AND REGULATING FLUID FLOW, AND METHODS OF MANUFACTURE THEREOF 审中-公开
用于监测和调节流体流动的芯片装置及其制造方法

  • Patent Title: CHIP DEVICE FOR MONITORING AND REGULATING FLUID FLOW, AND METHODS OF MANUFACTURE THEREOF
  • Patent Title (中): 用于监测和调节流体流动的芯片装置及其制造方法
  • Application No.: PCT/IL2015050111
    Application Date: 2015-02-01
  • Publication No.: WO2015114635A9
    Publication Date: 2016-08-11
  • Inventor: SHMILOVICH TSVIMOLINAZZI NICOLA
  • Applicant: EZMEMS LTD
  • Assignee: EZMEMS LTD
  • Current Assignee: EZMEMS LTD
  • Priority: US201461934715 2014-02-01; US201461943417 2014-02-23; US201462029512 2014-07-27
  • Main IPC: G01L9/00
  • IPC: G01L9/00
CHIP DEVICE FOR MONITORING AND REGULATING FLUID FLOW, AND METHODS OF MANUFACTURE THEREOF
Abstract:
A device for monitoring fluid media, and methods of manufacture thereof are disclosed. The monitoring device may be implemented as a single monolithic unit made from a certain type of material without a separate packaging, and having a base element comprising at least one fluid port and at least one cavity or fluid flow path fluidly coupled to the at least one fluid port for enabling fluid exchange of fluid media therewith. The device comprises at least one sensing element associated with the cavity or fluid flow path and configured and operable for measuring at least one property or condition of fluid media introduced therein to, and generate measurement data or signals indicative thereof. Electrical contacts disposed on the base element of the device, and electrically coupled to the at least one sensing element are used for establishing electrical connection with the at least one sensing element.
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