Invention Application
- Patent Title: SILICON SPEAKER
- Patent Title (中): 硅胶扬声器
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Application No.: PCT/CN2014/085206Application Date: 2014-08-26
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Publication No.: WO2016029358A1Publication Date: 2016-03-03
- Inventor: ZOU, Quanbo
- Applicant: GOERTEK INC.
- Applicant Address: No.268 DongFang Road, Hi-Tech Industry Development District WeiFang, Shandong 261031 CN
- Assignee: GOERTEK INC.
- Current Assignee: GOERTEK INC.
- Current Assignee Address: No.268 DongFang Road, Hi-Tech Industry Development District WeiFang, Shandong 261031 CN
- Agency: BEIJING GRANDER IP LAW FIRM
- Main IPC: H04R7/14
- IPC: H04R7/14 ; H04R19/02
Abstract:
A silicon speaker comprising an MEMS acoustoelectric chip and a PCB substrate (3), wherein the MEMS acoustoelectric chip comprises a corrugated diaphragm (1) on a silicon substrate (2); and one side surface of the MEMS acoustoelectric chip is metalized, and the metalized side surface (6) of the MEMS acoustoelectric chip is connected with the PCB substrate. The corrugated diaphragm is electrically conductive and interconnected with metal paths (5) on MEMS acoustoelectric chip, which is led out to a first PCB metal path as one electrode. A second PCB metal path below the MEMS chip forms another electrode of the electrostatic actuator.
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