发明申请
WO2016033148A1 PRECURSORS FOR ELECTRON BEAM-INDUCED DEPOSITION OF GOLD AND SILVER
审中-公开
用于电子束诱导的金和银沉积的前驱体
- 专利标题： PRECURSORS FOR ELECTRON BEAM-INDUCED DEPOSITION OF GOLD AND SILVER
- 专利标题（中）： 用于电子束诱导的金和银沉积的前驱体
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申请号： PCT/US2015/046872申请日： 2015-08-26
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公开(公告)号： WO2016033148A1公开(公告)日： 2016-03-03
- 发明人: MCELWEE-WHITE, Lisa , PEDZIWIATR, Jakub , FAIRBROTHER, D. Howard
- 申请人： UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- 申请人地址： 223 Grinter Hall Gainesville, FL 32611 US
- 专利权人： UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- 当前专利权人： UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- 当前专利权人地址： 223 Grinter Hall Gainesville, FL 32611 US
- 代理机构： BUESE, Mark A. et al.
- 优先权： US62/042,530 20140827
- 主分类号： C07F1/12
- IPC分类号： C07F1/12 ; C07F1/10 ; C07D207/30 ; C07D213/02
摘要：
Precursors are prepared and employed in electron beam induced decomposition (EBID). The EBID precursors are complexes of the formula: X-M-Y, where M is Au or Ag; X is F, C1, Br, I, CN, OR 1 , O 2 CR 2 , or R 3 ; Y is P(OR) 3 , NR 3 , unsubstituted or substituted pyrrole, unsubstituted or substituted pyridine, unsubstituted or substituted pyrrolidine, or unsubstituted or substituted piperidine; and where R, R 1 , R 2 , R 3 , and substituents of the substituted pyrrole, pyridine, pyrrolidine, or piperidine are independently H, C 1 -C 8 alkyl, C6- C 10 aryl, C 1 -C 8 perfluoroalkyl, C 1 -C 8 partially fluorinated alkyl, and SiR 5 R 6 R 7 where R 5 , R 6 , and R 7 are independently H, C 1 -C 8 alkyl, or C 1 -C 8 fluorinated alkyl. The decomposition of the EBID precursor results in the formation of one or more gold, silver, or any combination thereof features on a substrate.
