发明申请
- 专利标题： SOLAR CELL FABRICATED BY SIMPLIFIED DEPOSITION PROCESS
- 专利标题（中）： 通过简化沉积工艺制成的太阳能电池
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申请号： PCT/US2015/051561申请日： 2015-09-22
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公开(公告)号： WO2016049091A1公开(公告)日： 2016-03-31
- 发明人: RIM, Seung Bum , MOORS, Matthieu
- 申请人： SUNPOWER CORPORATION , TOTAL MARKETING SERVICES
- 申请人地址： 77 Rio Robles San Jose, California 95134 US
- 专利权人： SUNPOWER CORPORATION,TOTAL MARKETING SERVICES
- 当前专利权人： SUNPOWER CORPORATION,TOTAL MARKETING SERVICES
- 当前专利权人地址： 77 Rio Robles San Jose, California 95134 US
- 代理机构： VINCENT, Lester J. et al.
- 优先权： US14/495,565 20140924
- 主分类号： H01L31/18
- IPC分类号： H01L31/18 ; H01L31/0392 ; H01L31/04
摘要：
Methods of fabricating solar cells using simplified deposition processes, and the resulting solar cells, are described. In an example, a method of fabricating a solar cell involves loading a template substrate into a deposition chamber and, without removing the template substrate from the deposition chamber, performing a deposition method. The deposition method involves forming a first silicon layer on the template substrate, the first silicon layer of a first conductivity type. The deposition method also involves forming a second silicon layer on the first silicon layer, the second silicon layer of the first conductivity type. The deposition method also involves forming a third silicon layer above the second silicon layer, the third silicon layer of a second conductivity type. The deposition method also involves forming a solid state doping layer on the third silicon layer, the solid state doping layer of the first conductivity type.
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