An optical product for use in products such as window films and electronic displays is disclosed. The optical product includes a polymeric substrate and a hardcoat and has an abrasion resistance at the hardcoat surface as measured by haze increase of no more than 4.5% when measured according to Taber abrasion testing based on ASTM D1044 and a difference in water vapor transmission rate when compared to said polymeric substrate alone of no more than 5 grams/m2/day. These properties are achieved with a metal oxide hardcoat layer deposited as a thin film of a few microns by PECVD starting with suitable precusor gases.