Invention Application
- Patent Title: ARTICLES COATED WITH FLUORO-ANNEALED FILMS
- Patent Title (中): 涂有氟橡胶膜的文章
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Application No.: PCT/US2015/053260Application Date: 2015-09-30
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Publication No.: WO2016148739A1Publication Date: 2016-09-22
- Inventor: LIN, I-Kuan , GUNDA, Nilesh , RADGOWSKI, Dennis , VENKATRAMAN, Chandra
- Applicant: ENTEGRIS, INC.
- Applicant Address: 129 Concord Road, Building 2 Billerica, MA 01821 US
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: 129 Concord Road, Building 2 Billerica, MA 01821 US
- Agency: CARROLL, Alice, O. et al.
- Priority: US62/134,804 20150318; US62/208,532 20150821
- Main IPC: C23C14/08
- IPC: C23C14/08 ; C23C14/58 ; H01J37/32
Abstract:
Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium.
Information query
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