Invention Application
- Patent Title: METHOD FOR CORRECTING COORDINATE MEASUREMENT MACHINE ERRORS
- Patent Title (中): 校正坐标测量机错误的方法
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Application No.: PCT/EP2016056623Application Date: 2016-03-24
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Publication No.: WO2016151101A3Publication Date: 2016-10-27
- Inventor: STOTT CHRISTOPHER , OSBORNE NICHOLAS PATRICK , VANDENHOUDT GEERT
- Applicant: NIKON METROLOGY NV
- Assignee: NIKON METROLOGY NV
- Current Assignee: NIKON METROLOGY NV
- Priority: EP15161009 2015-03-26
- Main IPC: G01B21/04
- IPC: G01B21/04 ; H01B7/00 ; H01B11/00
Abstract:
The invention provides a method for creating or refining a mathematical correction model for correcting dybamic measurement errors in a co-ordinate measurement machine having at least 3 linear machine axes X, Y, and Z, each comprising a machine linear scale, and provided with a measurement probe. An error model for considering acceleration errors is created and refined using actual measurements of the probe position when accelerating. Also the probe offset from the linear translation axes is considered.
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