Invention Application
WO2017095731A2 APPLICATION OF MULTIPLE PLASMA COATING LAYERS IN A CONTINUOUS VACUUM
审中-公开
多层等离子涂层在连续真空中的应用
- Patent Title: APPLICATION OF MULTIPLE PLASMA COATING LAYERS IN A CONTINUOUS VACUUM
- Patent Title (中): 多层等离子涂层在连续真空中的应用
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Application No.: PCT/US2016/063819Application Date: 2016-11-28
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Publication No.: WO2017095731A2Publication Date: 2017-06-08
- Inventor: THAKORE, Ashir , YAO, Huazhen , LAI, Hengjie , LIU, Chao , NIU, Yaming , JIANG, Siguang
- Applicant: SABIC GLOBAL TECHNOLOGIES B.V. , THAKORE, Ashir
- Applicant Address: Plasticslaan 1 4612 PX Bergen Op Zoom NL
- Assignee: SABIC GLOBAL TECHNOLOGIES B.V.,THAKORE, Ashir
- Current Assignee: SABIC GLOBAL TECHNOLOGIES B.V.,THAKORE, Ashir
- Current Assignee Address: Plasticslaan 1 4612 PX Bergen Op Zoom NL
- Agency: QUICKER, Katrina, M. et al.
- Priority: US62/262,191 20151202
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/56 ; C23C14/02 ; C23C14/46 ; G02B1/00 ; H01J37/317 ; H01J37/34
Abstract:
A device and a process for applying multiple plasma coating layers in a vacuum, and a product created from that process. The process includes disposing a substrate in a vacuum chamber and applying multiple plasma coating layers to the substrate without breaking vacuum.
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