Invention Application
- Patent Title: INTEGRATED SPECTRAL UNIT
- Patent Title (中): 集成光谱单元
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Application No.: PCT/US2017/037684Application Date: 2017-06-15
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Publication No.: WO2017218778A1Publication Date: 2017-12-21
- Inventor: SABRY, Yasser, M. , KHALIL, Diaa Abdel, Maged , MEDHAT, Mostafa , HADDARA, Hisham , SAADANY, Bassam , HASSAN, Khaled
- Applicant: SI-WARE SYSTEMS
- Applicant Address: 555 California Street San Francisco, CA 94104 US
- Assignee: SI-WARE SYSTEMS
- Current Assignee: SI-WARE SYSTEMS
- Current Assignee Address: 555 California Street San Francisco, CA 94104 US
- Agency: RUDNICK, Holly
- Priority: US62/350,486 20160615
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J3/26
Abstract:
Aspects of the disclosure relate to an Integrated spectral unit including a micro- electro-mechanical systems (MEMS) interferometer fabricated within a first substrate arid a light redirecting structure- integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with, respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
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