Invention Application
- Patent Title: TOP HAT ELECTRODE FOR MEMORY APPLICATIONS AND METHODS OF FABRICATION
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Application No.: PCT/US2017/040504Application Date: 2017-06-30
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Publication No.: WO2019005163A1Publication Date: 2019-01-03
- Inventor: PILLARISETTY, Ravi , SHARMA, Abhishek A. , DEWEY, Gilbert , LE, Van H. , KAVALIEROS, Jack T.
- Applicant: INTEL CORPORATION , PILLARISETTY, Ravi , SHARMA, Abhishek A. , DEWEY, Gilbert , LE, Van H. , KAVALIEROS, Jack T.
- Applicant Address: 2200 Mission College Boulevard Santa Clara, California 95054 US
- Assignee: INTEL CORPORATION,PILLARISETTY, Ravi,SHARMA, Abhishek A.,DEWEY, Gilbert,LE, Van H.,KAVALIEROS, Jack T.
- Current Assignee: INTEL CORPORATION,PILLARISETTY, Ravi,SHARMA, Abhishek A.,DEWEY, Gilbert,LE, Van H.,KAVALIEROS, Jack T.
- Current Assignee Address: 2200 Mission College Boulevard Santa Clara, California 95054 US
- Agency: BRASK, Justin, K. et al.
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/10 ; H01L43/12
Abstract:
A memory structure includes a conductive interconnect disposed above a substrate, a memory device disposed above the conductive interconnect and coupled with the conductive interconnect. The memory device has sidewalls and an uppermost surface. For memory device and fabrication enablement, a top hat electrode is disposed on the memory device. The top hat electrode has sidewalls, a lowermost surface and an uppermost surface. The sidewalls of the top hat electrode extend beyond the sidewalls of the memory device. The top hat electrode has a lowermost surface area that is larger than an area of the uppermost surface of the memory device. A second conductive interconnect is disposed on the top hat electrode. The second conductive interconnect includes a via having sidewalls and a lowermost surface that is in contact with the uppermost surface of the top hat electrode.
Information query
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