Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE HAVING STRESSED VERTICAL SEMICONDUCTOR CHANNELS AND METHOD OF MAKING THE SAME
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Application No.: PCT/US2019/048170Application Date: 2019-08-26
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Publication No.: WO2020131170A1Publication Date: 2020-06-25
- Inventor: SHARANGPANI, Rahul , MAKALA, Raghuveer S. , RAJASHEKHAR, Adarsh , ZHOU, Fei , RANGANATHAN, Srikanth , NISHIDA, Akio , IIZUKA, Toshihiro
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: 5080 Spectrum Drive Suite 1050W Addison, Texas 75001 US
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: 5080 Spectrum Drive Suite 1050W Addison, Texas 75001 US
- Agency: RADOMSKY, Leon et al.
- Priority: US16/221,894 20181217; US16/221,942 20181217
- Main IPC: H01L27/11529
- IPC: H01L27/11529 ; H01L27/11556 ; H01L21/02
Abstract:
Three-dimensional memory devices include structures that induce a vertical tensile stress in vertical semiconductor channels to enhance charge carrier mobility. Vertical tensile stress may be induced by a laterally compressive stress applied by stressor pillar structure. The stressor pillar structures can include a stressor material such as a dielectric metal oxide material, silicon nitride, thermal silicon oxide or a semiconductor material having a greater lattice constant than that of the channel. Vertical tensile stress may be induced by a compressive stress applied by electrically conductive layers that laterally surround the vertical semiconductor channel, or by a stress memorization technique that captures a compressive stress from sacrificial material layers. Vertical tensile stress can be generated by a source-level pinning layer that prevents vertical expansion of the vertical semiconductor channel. Vertical tensile stress can be induced by using a layer stack including polysilicon and a silicon-germanium alloy for the vertical semiconductor channel.
Information query
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