Invention Application
- Patent Title: SYSTEM FOR TREATMENT AND/OR COATING OF SUBSTRATES
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Application No.: PCT/AU2020/050139Application Date: 2020-02-18
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Publication No.: WO2020168382A1Publication Date: 2020-08-27
- Inventor: HUSSEY, Thomas , CONOLLY, Brian , WHITBY, Scott
- Applicant: XEFCO PTY LTD
- Applicant Address: 3 Grove Street Lilyfield, New South Wales 2040 AU
- Assignee: XEFCO PTY LTD
- Current Assignee: XEFCO PTY LTD
- Current Assignee Address: 3 Grove Street Lilyfield, New South Wales 2040 AU
- Priority: AU2019900536 20190219
- Main IPC: D06M10/02
- IPC: D06M10/02 ; D06M23/00 ; C23C4/134 ; H05H1/24
Abstract:
A system for treating a substrate comprising a treatment module and a substrate plane. The substrate extending along a substrate plane to treat the substrate and wherein a fluid is deliverable via the module to a local region between the module and the substrate plane to treat the substrate with a predetermined treatment.
Information query
